Silicon Wafer Etching
Dry etch (plasma)
Isotropic Radial Etching (Chemical)
Sputter Etching (Physical)
Ion Milling (Physical)
Ion Beam Assisted Etching (Physical)
Reactive Ion Etching (Chemical/Physical)
Deep Reactive Ion Etching (Chemical/Physical)
Atomic Layer Etching
Plasma Ashing
Chemical Etching (CVD)
| Element | Symbol | State | Use |
|---|---|---|---|
