Process Nodes

TSMC, Samsung, Intel, SMIC, Rapidus · FinFET to GAA · backside power

Five companies make or are building 2nm-class or 5nm-class logic, and node names no longer measure anything physical. Only TSMC ships 2nm-class wafers at high volume to outside customers; nodes at 7nm and below were 79% of its wafer revenue in the third quarter of 2026.

Leading-edge node timelines, 2022 to 2029. TSMC: N3 in late 2022, N2 in volume from late 2025, A16 with backside power in 2027, A14 in late 2028, A12 in 2029. Samsung: SF3, the first gate-all-around node, in 2022, SF2 from late 2025, SF2P next. Intel: Intel 4 in 2023, 18A with backside power from late 2025, 14A in volume about 2029. SMIC: N+2 in 2023 and N+3, a 5nm-class node made without EUV, in late 2025. Rapidus: 2nm volume about 2027. Only TSMC ships 2nm-class wafers in high volume to outside customers. LEADING-EDGE NODES ENTERING VOLUME 2022 2024 2026 2028 2030 NOW TSMC N3 N2 A16 A14 A12 Samsung SF3 SF2 SF2P Intel Intel 4 18A 14A SMIC N+2 N+3 Rapidus 2nm FINFET GATE-ALL-AROUND PLUS BACKSIDE POWER PLANNED SOURCES: TSMC, INTEL, SAMSUNG, TRENDFORCE, TECHINSIGHTS, TECHSPOT, 2025 TO 2026. SMIC NODES ARE MADE WITH DUV MULTI-PATTERNING, NO EUV.
TSMC 7nm and below
79% of wafer revenue
TSMC 2nm
8% after two quarters
Intel 18A
~30K wafers a month
EUV systems, 2026
About 65
First GAA
Samsung SF3, 2022
Hub
Process

Node names

Node Names Are Brands, Not Measurements

The nanometer number in a node name stopped matching any physical feature around 2009. TSMC N3, Samsung SF3 and Intel 3 share a number and little else. A node name today stands for a package of density, power and performance gains over the foundry's previous node, and each foundry counts differently.

Comparing nodes by measurement, not by name
MeasureTSMC N2Intel 18ANote
Transistor typeGate-all-around nanosheetGate-all-around (RibbonFET)Both left FinFET at this node
Backside powerNo (comes with A16)Yes (PowerVia)Intel shipped backside power first
High-density SRAM bit cellAbout 0.0175 µm²0.021 µm²Smaller is denser; SRAM is a large share of AI chip area
Gain over prior nodeAbout 15% more density than N3E for mixed designs; 25 to 30% less powerAbout 1.3 times the density of Intel 3Each foundry measures against its own prior node
Tightest metal pitch (M0)Not disclosed32nmWiring pitch limits density as much as the transistor does

The fair way to compare foundries is transistor density in millions per square millimeter, SRAM cell size, transistor type, whether power runs on the back, and yield maturity. The name alone says only where a node sits in its own foundry's sequence.

Transistor types

Every Recent Node Changed the Transistor Shape

Shrinking dimensions alone stopped improving transistors more than a decade ago, so each recent node has leaned on a new transistor shape. Each shape gives the gate a firmer grip on the channel, which cuts leakage when the transistor is off.

Four transistor structures in cross-section. A planar transistor has the gate on top of a flat channel. A FinFET wraps the gate around three sides of a raised silicon fin. A gate-all-around nanosheet transistor surrounds stacked silicon sheets on all four sides. Backside power delivery adds a power network under the transistors, on the back of the wafer. Planar 28nm AND OLDER SILICON FinFET INTEL 22nm, 2012 TSMC 16nm, 2015 SILICON Gate-all-around SAMSUNG SF3, 2022 TSMC N2, INTEL 18A, 2025 SILICON Backside power INTEL 18A, 2025 TSMC A16, 2027 POWER WIRING ON THE BACK GATE IN BLUE, SILICON CHANNEL IN TEAL, OXIDE OUTLINE, POWER WIRING IN COPPER. NOT TO SCALE.
  • FinFET raised the channel into a fin with the gate on three sides. Intel shipped it first, in 2012; TSMC and Samsung followed at 16nm and 14nm. TSMC N3 is still FinFET.
  • Gate-all-around (GAA) stacks horizontal silicon sheets and wraps the gate around all four sides. Samsung shipped it first, at SF3 in 2022. TSMC N2 and Intel 18A both moved to GAA in late 2025.
  • Backside power moves the power wiring from above the transistors to the back of the wafer, leaving the front for signals. Intel PowerVia ships on 18A; TSMC's version, Super Power Rail, comes with A16 in 2027. The wiring side is covered on Back-End-of-Line (BEOL).
  • Complementary FET (CFET), which stacks the n-type and p-type transistors on top of each other, is in research at imec and the major foundries and is not on any announced production roadmap before 2030.

Lithography

One Company Makes Every EUV Scanner

The lithography ladder
GenerationMakerWhere it is used
DUV immersion, 193nmASML (most), Nikon; Canon in dry DUVMature nodes everywhere; down to 7nm-class and 5nm-class with multi-patterning, which is how SMIC builds N+2 and N+3
EUV, 0.33 numerical apertureASML only (NXE:3800E)All competitive 7nm and below production; 44 systems shipped in 2025, about 65 planned for 2026; not exportable to China
High-NA EUV, 0.55 numerical apertureASML only (EXE:5200B)Intel plans it for 14A; TSMC says A13 and A12 will not need it

ASML is the only company that builds EUV scanners, and its output sets how fast leading-edge capacity can grow anywhere. TSMC's decision to build A13 and A12 without high-NA EUV leaves Intel as the main production customer for ASML's newest tool. Tool detail is on Lithography Equipment and ASML EUV Scanner.

Foundry roadmaps

TSMC Leads Volume; Intel Leads Backside Power

Leading-edge nodes by foundry
NodeTransistor and lithographyStatus, October 2026Products
TSMC N3 familyFinFET; EUVHigh volume; 33% of TSMC wafer revenue in 3Q 2026Apple A17 to A19, NVIDIA Rubin, AMD and Qualcomm flagships
TSMC N2, N2PGAA nanosheet; EUVVolume since 4Q 2025 at Fab 20 and Fab 22; 8% of wafer revenue in 3Q 2026AMD EPYC Venice and 2026 mobile flagships
TSMC A16GAA plus Super Power Rail backside powerVolume moved to 2027Data center processors
TSMC A14, A13, A12GAA; second-generation nanosheets; no high-NA EUV plannedA14 high volume late 2028 at Fab 25; A13 and A12 in 2029Next-generation AI accelerators and CPUs
Samsung SF2, SF2PGAA (MBCFET); EUVSF2 volume since 4Q 2025, yield above 50% reported in January 2026; SF2P nextExynos 2600 in Galaxy S26; Tesla AI5 and AI6
Intel 18A, 18A-PGAA (RibbonFET) plus PowerViaHigh volume, about 30,000 wafers a month reported; 18A-P in risk productionPanther Lake; external foundry customers on 18A-P
Intel 14AGAA plus PowerVia; high-NA EUVExternal risk production 2028, high volume 2029Intel and foundry customers
SMIC N+3FinFET; DUV multi-patterning, no EUVIn production; confirmed in Huawei Kirin 9030 by TechInsights, December 2025Huawei only; China domestic
Rapidus 2nmGAA, developed with IBM; EUVPilot line in Chitose since 2025; volume about 2027No named customers

Revenue by node

2nm Reached 8% of TSMC Revenue in Two Quarters

TSMC's own revenue shows how fast the leading edge has become the business. In the third quarter of 2026, nodes at 7nm and below were 79% of its wafer revenue, and 2nm was already 8% two quarters after its first wafer revenue.

TSMC wafer revenue by node, third quarter of 2026: 2nm 8%, 3nm 33%, 5nm 28%, 7nm 10%, and 16nm and older 21%. Nodes at 7nm and below were 79%. TSMC WAFER REVENUE BY NODE, 3Q 2026 2nm 8% 3nm 33% 5nm 28% 7nm 10% 16nm and older 21%

TSMC's share of all foundry revenue was 72.5% in the second quarter of 2026 (TrendForce), and its share at the leading edge is higher still. Samsung and Intel together ship a small fraction of TSMC's leading-edge volume to outside customers.

US leading edge

Two US Sites Make Leading-Edge Logic Today

The US makes leading-edge logic at two sites today: Intel's 18A at Fab 52 and TSMC's N4 at Fab 21. The first US 3nm wafers are due from TSMC Arizona in 2027, and US 2nm-class foundry volume depends on Samsung Taylor's ramp and TSMC's third Arizona phase.

  • Made in US
  • US planned
  • Made abroad
US leading-edge logic sites
SiteLocationMakesStatusUS status
Intel Fab 52Chandler, AZIntel 18AOperatingMade in US
Intel D1XHillsboro, OR18A-P risk production; 14A development on high-NA EUVOperatingMade in US
TSMC Fab 21 phase 1Phoenix, AZN4OperatingMade in US
Samsung TaylorTaylor, TXSF2 for TeslaRampingUS planned
TSMC Fab 21 phase 2Phoenix, AZN3Production 3Q 2027US planned
TSMC Fab 21 phase 3Phoenix, AZN2 and A16Construction, later this decadeUS planned
Intel OhioNew Albany, OH14A and laterConstruction; operations 2030 to 2031US planned
Placeholder: remaining US leading-edge rows from the fab dataset

Mature nodes and China

Most Chips Still Come From 28nm and Above

Nodes of 28nm and above make most of the chips shipped by unit count: automotive and industrial microcontrollers, power management, analog, RF, display drivers and sensors. The 2021 to 2023 shortage that stopped car lines was a mature-node shortage. 28nm is the boundary of China's self-sufficiency push and the node every major foundry, including SMIC and Hua Hong, can make at volume. See Mature-Node Logic Fabs.

US export controls bar EUV scanners and the most capable DUV immersion scanners from China, along with advanced etch, deposition and inspection tools and leading AI chips. SMIC's answer is DUV multi-patterning: N+2 is 7nm-class and N+3 is 5nm-class, both made without EUV at higher cost and lower yield than TSMC's equivalents. TechInsights found N+3 meaningfully denser than N+2 but well short of TSMC and Samsung 5nm. The wider picture is on China Bifurcation.

Record

Page Record

Covers
Node naming, transistor architectures, lithography generations, foundry roadmaps, TSMC revenue by node, US leading-edge sites, mature nodes and export controls
Sources
TSMC 3Q 2026 results (October 15, 2026); TrendForce (TSMC roadmap, April 2026; foundry share, 2Q 2026); Tom's Hardware (Intel 18A details; TSMC fab roadmap, June 2026); TechSpot citing BlueFin Research (Intel 18A, July 2026); SamMobile citing ZDNet Korea (Samsung SF2, January 2026); TechInsights (SMIC N+3, December 2025); TechSpot (Rapidus, April 2026); ASML via Crypto Briefing (EUV units, July 2026); SemiconductorX fab dataset (October 2026)
Last verified
October 2026