Wafer Testing (Step )
Wafer testing, also known as wafer sort, is the first step in back-end semiconductor processing. After front-end fabrication and metallization are complete, each die on the wafer is electrically tested to screen out defective chips before packaging. Wafer testing improves yield, lowers costs, and ensures that only functional dies proceed to assembly and packaging.
Process Overview
- Purpose: Verify electrical functionality of dies before dicing and packaging.
- Method: Automated test equipment (ATE) applies signals to wafer through probe cards.
- Sequence: Wafer loaded ? probe card contacts each die ? functional and parametric tests ? binning of dies by performance.
- Outcome: Defective dies are marked or mapped in software for discard after dicing.
Key Equipment
- Probe Stations: Position wafer and bring spring-loaded probe needles into contact with each die’s bond pads.
- Probe Cards: Custom-designed interposers with thousands of probes matching die layout.
- Automated Test Equipment (ATE): Executes functional, speed, leakage, and parametric tests.
- Data Systems: Capture results and sort dies into performance “bins.”
Major Equipment Vendors
- Advantest (Japan): Global leader in ATE for logic, memory, and system-on-chip devices.
- Teradyne (U.S.): ATE platforms widely used for consumer, automotive, and mobile chips.
- Tokyo Electron (TEL, Japan): Wafer prober systems for automated handling.
- FormFactor (U.S.): Leading supplier of advanced probe cards.
Process Consumables
- Probe Cards: Custom consumables, replaced periodically due to wear.
- Cleaning Wafers: Used to remove debris and maintain probe accuracy.
- Data Storage Media: Large-scale test result logging for yield analysis and traceability.
Cleanroom & Environment
- Performed in Class 100–1000 cleanrooms, less stringent than front-end fabrication.
- Probing requires precise vibration control to ensure stable electrical contact.
- Thermal chambers may be used to test die performance across operating ranges.
Advantages & Constraints
- Advantages: Prevents costly packaging of defective dies; enables yield learning; sorts dies by speed and power bins.
- Constraints: Adds cycle time; probe card wear is costly; very fine-pitch devices at advanced nodes are challenging to probe.
Market Outlook
Wafer testing is expanding with the rise of heterogeneous integration and chiplets, as more dies must be pre-qualified before advanced packaging. Probe card complexity and cost are growing rapidly for memory and high-performance AI/logic devices. Automation and data analytics are increasingly integrated into wafer sort operations.