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Semiconductor Process Inputs Overview



Semiconductor process inputs are the materials every fab consumes continuously to make chips: mined raw materials such as quartzite, gallium, germanium and rare earths, plus ultra-high-purity gases, specialty chemicals, photoresist, chemical mechanical planarization (CMP) slurries and photomasks. Contamination or a supply disruption in any of them cuts directly into wafer yield and fab output.

Process inputs are among the most geopolitically exposed parts of the semiconductor supply chain. Supply is geographically concentrated, many inputs are subject to export controls, and qualification cycles that can run as long as a decade make substitution slow and disruptions costly.


Semiconductor Process Input Segments

SegmentExamplesRepresentative SuppliersKey RiskDetail Page
Critical Elements & Raw MaterialsGallium, germanium, indium, tungsten, rare earths, neon, quartziteMining majors; Chinese refiners (dominant in Ga, Ge, REEs); Wolfspeed/SICC (SiC feedstock)China export controls on Ga, Ge, In, W, REEs; neon concentration in Ukraine; byproduct supply dynamicsCritical Elements & Geopolitics
Polysilicon & Silicon FeedstockQuartzite to MG-Si to polysilicon (Siemens process, FBR); semiconductor-grade and solar-gradeWacker Chemie (DE), Hemlock (US), Tokuyama (JP); Tongwei, GCL TECH (CN) for solar-gradeChina about 85% of solar-grade polysilicon; 2025 export controls on 6N to 9N polysilicon and CVD equipment; Siemens process energy intensityQuartzite Mining & Polysilicon
Process GasesNeon (DUV litho), NF3 (chamber clean), SiH4 (deposition), GeH4 (SiGe CVD), SF6 (etch), Ar, HeLinde (IE), Air Liquide (FR), Air Products (US), Taiyo Nippon Sanso/Matheson (JP); SK Materials (KR) for NF3Neon Ukraine concentration; GeH4 tied to Chinese germanium export controls; NF3 East Asia production concentration; noble gas supply tied to steel-plant byproduct economicsProcess Gases
Critical ChemicalsHF, H2SO4, IPA, TMAH, NMP; CMP slurries; encapsulantsStella Chemifa (JP, HF); BASF (DE); Entegris/CMC, DuPont, Fujimi, AGC (CMP); Sumitomo Bakelite (JP, EMC)Semiconductor-grade HF concentrated at Stella Chemifa; ceria CMP slurry exposed to rare earth export controls; PFAS regulatory pressure on photoresist chemistriesCritical Chemicals
PhotoresistArF immersion CAR, EUV CAR, Metal Oxide Resist (MOR/Inpria), KrFJSR (JP, JIC-owned), TOK (JP), Shin-Etsu Chemical (JP), Sumitomo Chemical (JP), Fujifilm (JP); Dongjin Semichem (KR)About 90% of advanced photoresist from Japan; JSR taken private by the Japanese government; EUV MOR supply pre-commercial; High-NA EUV resist in developmentPhotoresist
CMP SlurriesSilica slurry (oxide/silicon), ceria slurry (STI), copper slurry (BEOL), tungsten slurry (contacts), SiC slurryEntegris/CMC Materials (US, about 30%), DuPont (US, about 22%), Fujimi (JP, about 15%), AGC/Seimi Chemical (JP, ceria), Resonac/Hitachi Chemical (JP)Ceria abrasive tied to rare earth cerium oxide; Entegris-CMC consolidation raised single-supplier concentration; new materials (Ru, Co) require new slurry qualificationsCMP Slurries
Photomasks & Mask BlanksEUV masks, ArF masks, PSM; EUV mask blanks (Mo/Si multilayer on ULE glass); EUV pelliclesBlanks: AGC (JP, about 60%), Hoya (JP, about 35%); Masks: Tekscend/Toppan (JP), DNP (JP), Photronics (US); Pellicles: Mitsui Chemicals (JP)EUV mask blank AGC/Hoya duopoly with no viable third supplier; pellicle durability at High-NA EUV power; Lasertec actinic inspection single-sourceEUV Mask Blanks & Pellicles | Photomasks
Process Chemicals ReferenceAbout 55 key chemicals organized by process step: cleaning, lithography, deposition, etch, CMP, doping, BEOL/packagingSee reference page for per-chemical supplier detailVaries by chemical; see Critical Chemicals for analysisProcess Chemicals Reference

Semiconductor Raw Materials from Mine to Fab

Most semiconductor-critical elements are byproducts of larger primary metal production:

  • Gallium: recovered from bauxite during aluminum refining.
  • Germanium: recovered from zinc ore processing and coal fly ash.
  • Indium: recovered from zinc and tin smelting.

Output of these elements therefore follows the economics of the primary metal. When aluminum smelters cut production, gallium production falls with it.

Raw MaterialPrimary SourceSemiconductor UseStrategic Note
Quartzite (SiO2)High-purity silica deposits; US, Norway, Brazil, UKReduced to MG-Si in arc furnaces; refined to polysilicon; also used for quartz crucibles in CZ crystal growthSpruce Pine (NC, US) is the primary global source of ultra-high-purity quartz for semiconductor crucibles; two companies, Sibelco and The Quartz Corp (Imerys and Norsk Mineral), control this niche
Gallium (Ga)Byproduct of bauxite/aluminum refining; about 80% from ChinaGaAs and GaN compound semiconductors; TMGa MOCVD precursorChinese export licensing since Aug 2023; about 35 tonnes/year produced outside China; no quick alternative refining base
Germanium (Ge)Byproduct of zinc ore processing; about 60% from ChinaSiGe CVD channels (GeH4 precursor); infrared optics; fiber opticsChinese export licensing since Aug 2023; China germanium controls directly affect GeH4 availability for advanced transistor manufacturing
Indium (In)Byproduct of zinc and tin smelting; about 57% refined in ChinaInP substrates; ITO transparent electrodes; TMIn MOCVD precursorChinese export licensing since Feb 2025; AI-driven InP photonics demand accelerating against constrained supply
Tungsten (W)Primary tungsten mining; >80% from China (USGS)Tungsten plug fill and contact CMOS interconnects (WF6 CVD precursor); sputtering targetsChinese export licensing since Feb 2025; every advanced logic node uses tungsten fill; no practical substitute
Rare Earths (Dy, Nd, Ce)>90% processing in China; mine production from China, Australia, USNdFeB magnets in fab equipment (motors, ASML scanners, ion implanters); CeO2 ceria CMP abrasive; laser gain mediaSeven REEs under Chinese export licensing since Apr 2025; Oct 2025 extraterritorial expansion (suspended to Nov 2026); magnet supply critical for all fab equipment
Tantalum (Ta)DRC (about 40% of mine output), Rwanda, Australia; Ningxia Orient (CN) major processorDRAM/logic capacitors (Ta2O5 dielectric); BEOL diffusion barriers (TaN)No Chinese export controls; conflict mineral sourcing risk from DRC; OECD due diligence requirements

From Quartzite to Metallurgical-Grade Silicon

The silicon supply chain starts by converting quartzite into metallurgical-grade silicon (MG-Si) through carbothermic reduction in submerged electric arc furnaces. Quartzite and carbon reducing agents such as coke, coal and woodchips react above 1,800C (SiO2 + 2C to Si + 2CO) to yield MG-Si at about 98% to 99% purity.

MG-Si feeds polysilicon production after further chemical purification, and also goes into aluminum alloys and silicone chemistry. China produces about 65% of global MG-Si, with Norway and Brazil the main alternative producers. The power source sets the carbon footprint: Norwegian MG-Si runs on hydroelectric power, while Chinese production runs mostly on coal, which matters for the EU Carbon Border Adjustment Mechanism (CBAM) tariffs on polysilicon imports.


Process Input Supply Chain Outlook

Fabs consume process inputs continuously and hold weeks to months of buffer inventory for most chemicals and gases, not years, so stockpiling offers limited protection. Rolling Chinese export controls from 2023 through 2025 turned geographic concentration risk into actual supply disruptions and sustained price increases.

Qualification keeps the concentration in place. A fab cannot switch to a Western alternative source without months of requalification, and by the time requalification is done the original disruption may have ended, removing the economic reason to finish diversifying. This cycle sustains geographic concentration across most process input categories.


Related Coverage

Semiconductor Process Gases | Semiconductor Critical Chemicals | Photoresist Supply Chain | CMP Slurry Suppliers & Abrasive Chemistry | EUV Mask Blanks & Pellicles | Photomasks & Reticles | Semiconductor Process Chemicals | CMP Slurries & Polishing Compounds | Semiconductor Bottleneck Atlas | Fabless Design & IP Cores