ASML

Veldhoven · Carl Zeiss SMT · Cymer · EUV and DUV capacity

ASML is the only EUV scanner maker, and Carl Zeiss SMT is ASML's only optics maker. ASML owns 24.9% of Zeiss SMT and bought €4.41 billion from it in 2025, about 13% of its sales; its 2026 capacity of about 65 low-NA EUV tools caps how much leading-edge fab capacity the world can add.

ASML supply and sales. Carl Zeiss SMT in Oberkochen, Germany, is ASML's only source of optics; ASML owns 24.9% of it and bought 4.41 billion euros from it in 2025, about 13% of ASML sales. Trumpf in Germany supplies the CO2 drive laser; Cymer in San Diego, owned by ASML since 2013, builds EUV light sources; ASML Wilton in Connecticut builds reticle stages; VDL ETG in the Netherlands builds frames and modules. ASML assembles in Veldhoven. Its tool sales in the third quarter of 2026 went 32% to Taiwan, 31% to South Korea, 23% to China and 13% to the United States. ONE SUPPLIER ASML CANNOT REPLACE, AND WHERE ITS TOOLS GO Carl Zeiss SMT OBERKOCHEN, GERMANY EVERY MIRROR AND LENS, SOLE SOURCE ASML OWNS 24.9% SINCE 2017 €4.41B BOUGHT IN 2025 Trumpf CO2 DRIVE LASER, SOLE SOURCE Cymer, San Diego EUV SOURCE; OWNED SINCE 2013 ASML Wilton, Connecticut RETICLE STAGES VDL ETG and others FRAMES, MODULES; ~5,000 SUPPLIERS ASML VELDHOVEN ASSEMBLY TOOL SALES, Q3 2026 TAIWAN 32% SOUTH KOREA 31% CHINA 23% US 13% 13% OF ASML 2025 SALES WENT TO ZEISS SMT PURCHASES (COMPUTED) GERMANY US NETHERLANDS ZEISS FIGURES FROM ASML 2025 ANNUAL REPORT VIA IMPLICATOR; REGIONAL SPLIT OF EQUIPMENT SALES FROM ASML Q3 2026 DATA VIA XENOSPECTRUM; 1% OTHER NOT SHOWN.
Sales, Q3 2026
€11.66B
2026 outlook
€44-45B
Zeiss stake
24.9%
Zeiss purchases, 2025
€4.41B
China, Q3 2026
23% of tools
Hub
Spotlights

Suppliers

ASML Owns a Quarter of the One Supplier It Cannot Replace

ASML's critical suppliers
SupplierMakesCountryRelationship
Carl Zeiss SMTEvery optic: EUV mirrors, DUV lenses, illuminatorsGermanySole source; ASML owns 24.9% since 2017; ASML loans to Zeiss of €1.91B at end 2025
TrumpfCO2 drive lasers for the EUV sourceGermanySole source; long-term contract
CymerEUV and DUV light sourcesUS (San Diego)Owned since 2013 (about $2.5B)
ASML Berlin (Berliner Glas)Wafer tables, clamps, optical modulesGermanyOwned since 2020
HMIE-beam inspection toolsTaiwanOwned since 2016
VDL ETGFrames, wafer handlers, modulesNetherlandsLargest Dutch contract maker

ASML assembles scanners from parts made by about 5,000 suppliers, but it has no second source for the optics. Its 2025 annual report names Carl Zeiss SMT as its only supplier of optical columns and says ASML could not run its business without them. ASML bought €3.33 billion from Zeiss SMT in 2023, €3.95 billion in 2024 and €4.41 billion in 2025, about 13% of its €32.7 billion in 2025 sales. Instead of qualifying a second optics maker, ASML has bought into its suppliers: a quarter of Zeiss SMT, and outright ownership of Cymer and Berliner Glas. Zeiss's new Oberkochen buildings add about 25,000 m2 of production space; their added optics output has not been published. How the optics work is on ASML EUV Scanner.

Capacity

ASML's Output Caps New Leading-Edge Capacity

ASML low-NA EUV output and capacity: 48 EUV systems sold in 2025; capacity about 65 in 2026; about 85 in 2027 after the planned 30% addition, computed; about 110 in 2028 if a further 30% under study is added, computed. ASML says planned supply for 2027 and 2028 will not fully meet demand. EUV SCANNERS PER YEAR: SOLD, THEN CAPACITY 2025 48 EUV SYSTEMS SOLD 2026 ~65 LOW-NA CAPACITY (ASML) 2027 ~85 PLUS 30% PLANNED (COMPUTED) 2028 ~110 PLUS 30% MORE UNDER STUDY (COMPUTED) ASML: PLANNED SUPPLY FOR 2027 AND 2028 "WILL NOT FULLY MEET" DEMAND (OCTOBER 14, 2026).

No other company sells EUV scanners, so ASML's output sets how many leading-edge fab lines can be added each year. On October 14, 2026, ASML raised its full-year 2026 sales outlook to €44 to 45 billion after third-quarter sales of €11.66 billion and 113 new systems sold, and said its supply as planned for both 2027 and 2028 will not fully meet customer demand. It is adding 30% to low-NA EUV and immersion DUV capacity for 2027, is studying more for 2028, and has customers asking to place orders for 2029 and 2030. The limit on that ramp is Zeiss mirror output as much as ASML's own floor space.

Customers

Taiwan, Korea and China Take Most of ASML's Tools

Where ASML tools went, third quarter of 2026
RegionShare of equipment salesMain buyers
Taiwan32%TSMC (N2 and A16 ramps), with Arizona tools counted by ship-to
South Korea31%Samsung and SK hynix: DRAM and HBM EUV layers
China23%SMIC, Hua Hong, CXMT and others: DUV only
United States13%Intel, TSMC Arizona, Micron, Samsung Taylor

Three regions take three-quarters of ASML's tools, and the order is set by memory and foundry spending: Korea's share has risen with the HBM build-out. Regional shares are computed from ASML's third-quarter data by XenoSpectrum; ASML's release does not publish them.

China

China Fell From Half of ASML's Sales to About a Fifth

China share of ASML sales: nearly half in 2024, drawn at 47% for illustration; 19% of total sales in the first quarter of 2026; 14% of equipment sales in the second quarter; 23% of equipment sales in the third quarter; about 20% expected for full-year 2026. CHINA SHARE OF ASML SALES NEARLY HALF 2024 19% Q1 2026 14% Q2 2026 23% Q3 2026 ~20% 2026 FY 2024 AND Q1 2026: SHARE OF TOTAL SALES. Q2 AND Q3: SHARE OF EQUIPMENT SALES. DASHED: ASML EXPECTATION.

China was nearly half of ASML's sales in 2024, as Chinese fabs bought DUV scanners ahead of tighter Dutch and US rules. The share fell to 19% of total sales in the first quarter of 2026, 14% of equipment sales in the second and 23% in the third; ASML expects about 20% for the year. No EUV scanner has ever shipped to China, and the most advanced immersion DUV models need export licenses. See China Bifurcation.

US sites

Two EUV Modules Are Built in the United States

  • Made in US
  • Made abroad
ASML in the United States
SiteMakes or doesNoteUS status
Cymer, San Diego, CaliforniaEUV light sources and DUV lasersThe US content behind US export rules over EUVMade in US
ASML Wilton, ConnecticutEUV reticle stages and handlingFormer SVG Lithography siteMade in US
Customer support offices near US fabsInstallation and serviceFollows the US fab build-outMade in US
Scanner integrationFinal assembly and testVeldhoven onlyMade abroad
Placeholder: other ASML US sites: Brion computational lithography software, San Jose

Two of the six major EUV modules are built in the United States, and that content is the legal basis for US controls on a Dutch machine. US fabs took 13% of ASML's tool sales in the third quarter of 2026.

Record

Page Record

Covers
ASML's critical suppliers and ownership stakes, Zeiss SMT purchases, EUV capacity, sales by region, China share and US sites
Sources
ASML third-quarter 2026 results (October 14, 2026, Form 6-K); ASML 2025 annual report figures on Zeiss SMT via Implicator; XenoSpectrum on ASML third-quarter 2026 sales by region (October 15, 2026, computed from ASML data); Caixin on first-quarter 2026 China share (April 16, 2026); Leverage Shares on second-quarter 2026 (July 17, 2026); ASML 2025 results (January 28, 2026) for 2025 sales and EUV units; capacity for 2027 and 2028 and the Zeiss share of sales computed
Last verified
October 2026