Semiconductor fabs are among the most resource-intensive industrial facilities on earth. Advanced fabrication requires continuous, high-quality power, millions of gallons of ultra-pure water per day, and tightly controlled cleanroom environments. As fabs expand globally, their energy and environmental footprints have become strategic concerns — driving investment in clean power, microgrids, water recycling, and sustainability initiatives.
Scope of Energy & Utilities
- Power Supply – Fabs consume 30–60 MW of power each (on par with small cities). Dependable, clean electricity is critical to continuous operation.
- Water & UPW Systems – Ultra-Pure Water (UPW) is essential for wafer cleaning and etching, with daily demand in millions of gallons.
- Cooling & HVAC – Chillers, air handlers, and cleanroom HVAC systems maintain temperature and particulate control.
- Sustainability & Emissions – Scope 1 and 2 emissions reduction, chemical abatement, renewable PPAs, and recycling programs.
Energy & Utility Mapping
Category |
Key Components |
Representative Companies |
Notes |
Power Supply |
Grid interconnects, transformers, UPS, microgrids |
Siemens, Schneider Electric, Tesla (Megapack) |
Reliability and quality of power are critical for EUV tools |
Water & UPW |
Intake systems, filtration, polishing, wastewater recycling |
Kurita, Veolia, Ovivo |
Water recycling rates of 80–90% targeted at modern fabs |
Cooling & HVAC |
Chillers, AHUs, HEPA filters, process cooling systems |
Daikin, Trane, Johnson Controls |
Maintains <1 particle per cubic meter in cleanrooms |
Sustainability & Emissions |
GHG abatement, renewables, carbon capture, PPAs |
Entegris, Linde, Air Liquide |
Process gases like NF3 and SF6 are potent greenhouse contributors |
Market & Sustainability Outlook
Priority |
Driver |
Industry Response |
Notes |
1 |
Power Reliability |
Onsite microgrids, redundant power feeds |
Grid stability critical for EUV uptime |
2 |
Water Scarcity |
Recycling, desalination, efficiency upgrades |
Arizona and Taiwan fabs under pressure |
3 |
Greenhouse Gas Emissions |
Abatement systems, alternatives to SF6/NF3 |
Industry pledged to net-zero by 2050 |
4 |
Sustainability Goals |
100% renewable PPAs, carbon accounting |
TSMC, Intel, Samsung all publish ESG targets |
FAQs
- How much power does a semiconductor fab use? – A leading-edge fab may draw 30–60 MW continuously, comparable to a mid-sized city.
- Why do fabs need so much water? – Ultra-Pure Water (UPW) is required for wafer cleaning, etching, and rinsing, with demand often in the millions of gallons per day.
- Which process gases are most concerning for emissions? – NF3, SF6, and perfluorocarbons have high global warming potential, making abatement systems essential.
- Are fabs adopting renewable energy? – Yes, leading companies are signing PPAs for solar and wind and deploying onsite BESS and microgrids to reduce carbon footprints.
- How is water scarcity addressed? – Through wastewater recycling (up to 90%), desalination in coastal fabs, and advanced treatment systems.