Semiconductor NanoFabs
Nanofabs are small-scale semiconductor fabrication facilities designed primarily for research, prototyping, and workforce training. Unlike high-volume fabs, which span hundreds of thousands of square feet and run 24/7, nanofabs typically occupy 1,000β20,000 sq. ft and focus on flexibility over throughput. They are central to university programs, national laboratories, and corporate R&D efforts, providing access to lithography, deposition, etching, and metrology tools for experimental and early-stage device development. Nanofabs bridge the gap between lab-scale research and industrial production, while also serving as training grounds for the next generation of semiconductor engineers.
Nanofab Characteristics
- Scale: 1,000β20,000 sq. ft cleanrooms vs 100,000β200,000+ sq. ft for production fabs.
- Toolset: Broad but less redundant; includes lithography, deposition, etch, and inspection tools, often shared among researchers.
- Flexibility: Designed for rapid reconfiguration and experimentation with new materials and processes.
- Access Model: Operated on a shared-use or membership basis, serving universities, startups, and corporate researchers.
Nanofab Mapping
Facility | Location | Scale | Focus | Notes |
---|---|---|---|---|
MIT.nano | Cambridge, MA, USA | 214,000 sq. ft (nanofab core ~20,000 sq. ft) | Interdisciplinary nanoengineering, photonics, quantum | One of the largest academic nanofabs in the U.S. |
Stanford Nanofabrication Facility (SNF) | Stanford, CA, USA | ~10,000 sq. ft | Prototyping, MEMS, sensors | Open to external users under membership model |
Cornell NanoScale Science & Technology Facility (CNF) | Ithaca, NY, USA | ~15,000 sq. ft | MEMS, photonics, 2D materials | Funded by NSF; part of NNCI network |
imec Pilot Lines | Leuven, Belgium | Pilot-scale cleanrooms (20,000+ sq. ft) | Logic, memory, photonics R&D | Bridges nanofab flexibility with near-production scale |
Nanofab Directory
NanoFab | University | Location |
---|---|---|
Adams Microfabrication Facility | University of Kansas | Lawrence, Kansas |
Advanced Science Research Center Nanofabrication Facility | City University of New York | New York, New York |
Aggie Nanofabrication Facility | Texas A&M University | College Station, Texas |
Alabama Microelectronics Science & Technology Center | Auburn University | Auburn, Alabama |
Albany NanoTech Complex | SUNY Polytechnic Institute | Albany, New York |
Applied Research Center | Old Dominion University | Norfolk, Virginia |
ASU NanoFab | Arizona State University | Tempe, Arizona |
BioNIUM Nanofab Cleanroom Facility | University of Miami | Miami, Florida |
Birck Nanotechnology Center | Purdue University | West Lafayette, Indiana |
BYU Integrated Microfabrication Lab | Brigham Young University | Provo, Utah |
Caltech MEMS Lab | California Institute of Technology | Pasadena, California |
CAMCOR Nanofabrication & Imaging Facility | University of Oregon | Eugene, Oregon |
Cameron Cleanroom | UNC Charlotte | Charlotte, North Carolina |
Center for Advanced Microstructures & Devices | Louisiana State University | Baton Rouge, Louisiana |
Center for High Technology Materials Cleanroom | University of New Mexico | Albuquerque, New Mexico |
Center for Materials, Devices, & Integrated Systems | Rensselaer Polytechnic Institute | Troy, New York |
Center for Micro/Nano Systems & Nanotechnology | University of Missouri Columbia | Columbia, Missouri |
Center for Nano-MicroManufacturing | University of California at Davis | Davis, California |
Center for Nanoscale Science & Engineering Cleanroom | University of Kentucky | Lexington, Kentucky |
Center for Nanoscale Science & Engineering Cleanroom | North Dakota State University | Fargo, North Dakota |
Center for Nanoscale Systems | Harvard University | Cambridge , Massachusetts |
Center for Nanostructures | Santa Clara University | Santa Clara, California |
Center for Prototype Manufacturing of Nanostructured Electroceramics | Alfred University | Alfred, New York |
Chapel Hill Analytical & Nanofabrication Laboratory | University of North Carolina | Chapel Hill, North Carolina |
Cleanroom Facility | San Diego State University | San Diego, California |
Cleanroom Facility | Colorado State University | Fort Collins, Colorado |
Cleanroom Facility | South Dakota State | Brookings, South Dakota |
Cleanroom Facility | West Virginia University | Morgantown, West Virginia |
Cleanroom Research Laboratory | University of Texas Dallas | Dallas, Texas |
Clemson University Micro Fabrication Facility | Clemson University | Clemson, South Carolina |
Colorado Nanofabrication Lab | University of Colorado Boulder | Boulder, Colorado |
Columbia Nano Initiative Nanofabrication Cleanroom | Columbia University | New York, New York |
Conte Nanotechnology Cleanroom Lab | University of Massachusetts Amherst | Amherst, Massachusetts |
Cornell NanoScale Science & Technology Facility | Cornell University | Ithaca, New York |
CREOL Nanofabrication facility | University of Central Florida | Orlando, Florida |
Electrical & Computer Engineering Research Cleanroom | Michigan State University | East Lansing, Michigan |
Electronic Devices & Materials Laboratory | Air Force Institute of Technology | Dayton, Ohio |
Electronics Design Center | Case Western Reserve University | Cleveland, Ohio |
Engineering Research Center Cleanroom | University of Cincinnati | Cincinnati, Ohio |
Georgetown Nanoscience & Microtechnology Laboratory | Georgetown University | Washington, District of Columbia |
GW Nanofabrication & Imaging Center | George Washington University | Washington, District of Columbia |
Helmerich Research Center Cleanroom | Oklahoma State University | Tulsa, Oklahoma |
High Density Electronics Center | University of Arkansas | Fayetteville, Arkansas |
Howard Nanoscale Science & Engineering Facility | Howard University | Washington, District of Columbia |
Idaho Microfabrication Laboratory | Boise State University | Boise, Idaho |
IEN - Micro/Nanofabrication Facility | Georgia Institute of Technology | Atlanta, Georgia |
Institute for Micromanufacturing | Louisiana Tech University | Ruston, Louisiana |
Institute of Materials Science & Engineering Cleanroom | Washington University in St. Louis | Saint Louis, Missouri |
Institute of Nanoscale Science & Engineering | Vanderbilt University | Nashville, Tennessee |
Integrated Bioscience & Nanotechnology Cleanroom | University of Georgia | Athens, Georgia |
Integrated Nanofabrication & Cleanroom Facility | Lehigh University | Bethlehem, Pennsylvania |
Integrated Nanosystems Development Institute | Indiana University | Indianapolis, Indiana |
Integrated Nanosystems Research Facility | University of California at Irvine | Irvine, California |
Integrated Sciences Cleanroom & Nanofabrication Facility | Boston College | Chestnut Hill, Massachusetts |
Integrated Systems Nanofabrication Cleanroom | University of California at Los Angeles | Los Angeles, California |
Intelligent Microsystem Laboratory | Missouri University of Science & Technology | Rolla, Missouri |
Interdisciplinary Microsystems Laboratory | Florida State University | Tallahassee, Florida |
John OBrien Nanofabrication Laboratory | University of Southern California | Los Angeles, California |
Kavli Nanoscience Institute Cleanroom Facility | California Institute of Technology | Pasadena, California |
Keck Microfabrication Facility | Michigan State University | East Lansing, Michigan |
Kostas Nanoscale Technology & Manufacturing Research Center | Northeastern University | Boston, Massachusetts |
Laboratory for Surface Science & Technology | University of Maine | Orono, Maine |
Lurie Nanofabrication Facility | University of Michigan | Ann Arbor, Michigan |
Marquette University Cleanroom | Marquette University | Milwaukee, Wisconsin |
Marvell Nanofabrication Laboratory | University of California at Berkeley | Berkeley, California |
Maryland Nanocenter Fablab | University of Maryland | College Park, Maryland |
Materials for Opto/Electronics Research & Education Center | Case Western Reserve University | Cleveland, Ohio |
MEMS Research Laboratory | University of Texas San Antonio | San Antonio, Texas |
Micro & Nanofabrication Laboratory | Virginia Polytechnic Institute & State University | Blacksburg, Virginia |
Micro & Nanotechnology Lab | University of Illinois Urbana-Champaign | Urbana, Illinois |
Micro- & Nanotechnology Center Cleanroom | Norfolk State University | Norfolk, Virginia |
Micro-Fabrication Facility | University of Alabama | Tuscaloosa, Alabama |
Micro-Nano-Mechanical Systems Cleanroom | University of Illinois Urbana-Champaign | Urbana, Illinois |
Micro/Nano Biosystems Fabrication Facilities | Boston University | Boston, Massachusetts |
Micro/Nano Technology Center | University of Louisville | Louisville, Kentucky |
Micro/Nanofabrication Center | University of Arizona | Tucson, Arizona |
Micro/Nanofluidics Lab | University of South Carolina | Columbia, South Carolina |
MicroDevice Laboratory | Stevens Institute of Technology | Hoboken, New Jersey |
Microelectronic Research Laboratory | University of Louisiana at Lafayette | Lafayette, Louisiana |
Microelectronics Core Facility | Brown University | Providence, Rhode Island |
Microelectronics Fabrication Center | New Jersey Institute of Technology | Newark, New Jersey |
Microelectronics Research & Development Laboratory | Northern Illinois University | DeKalb, Illinois |
Microelectronics Research Center | Iowa State University | Ames, Iowa |
Microelectronics Research Center Cleanrooms | University of Texas Austin | Austin, Texas |
Microelectronics Research Laboratory | Rutgers University | Piscataway, New Jersey |
Microelectronics/Optoelectronics Laboratory | University of Connecticut | Storrs, Connecticut |
Microengineering Cleanroom Laboratory | Dartmouth College | Hanover, New Hampshire |
Microfabrication Cleanroom | Washington State University | Pullman, Washington |
Microfabrication Facility | Drexel University | Philadelphia, Pennsylvania |
Microfabrication Research & Education Center | University of Oklahoma | Norman, Oklahoma |
Microfabrication Shared Facility | Michigan Technological University | Houghton, Michigan |
Microprocessing Research Facility | University of Tennessee | Knoxville, Tennessee |
Microscale Process Engineering Laboratory | San Jose State University | San Jose, California |
MicroSystems Technology Group Cleanroom | California Polytechnic State University | San Luis Obispo, California |
Microsystems Technology Laboratories | Massachusetts Institute of Technology | Cambridge , Massachusetts |
Minnesota Nano Center | University of Minnesota | Minneapolis, Minnesota |
MIT Nano Cleanroom | Massachusetts Institute of Technology | Cambridge , Massachusetts |
Montana Microfabrication Facility | Montana State | Bozeman, Montana |
Nano & Micro Devices Center | University of Alabama in Huntsville | Huntsville, Alabama |
Nano Tech Center | Texas Tech University | Lubbock, Texas |
Nano-Micro Fabrication Laboratory | University of Massachusetts Lowell | Lowell, Massachusetts |
Nanofabrication Cleanroom | University of North Texas | Denton, Texas |
Nanofabrication Facility | Wayne State University | Detroit, Michigan |
Nanofabrication Facility | University of Houston | Houston, Texas |
Nanofabrication Lab | Penn State University | State College, Pennsylvania |
Nanofabrication Laboratory | Carnegie Mellon University | Pittsburgh, Pennsylvania |
Nanofabrication Research Service Center | Texas State University | San Marcos, Texas |
NanoMaterials Integration Lab | University of Texas El Paso | El Paso, Texas |
Nanoscale Characterization Facility | University of Indiana | Bloomington, Indiana |
Nanoscale Fabrication & Characterization Facility | University of Pittsburgh | Pittsburgh, Pennsylvania |
NanoSystems Lab | Ohio State University | Columbus , Ohio |
Nanotech West Lab | Ohio State University | Columbus , Ohio |
Nanotechnology Core Facility | University of Illinois Chicago | Chicago, Illinois |
Nanotechnology Research & Education Center | University of South Florida | Tampa, Florida |
NCMN NanoFab Cleanroom | University of Nebraska-Lincoln | Lincoln, Nebraska |
NCSF Nanofabrication Facility | North Carolina State University | Raleigh, North Carolina |
NEST Nanofabrication Laboratory | University of Dayton | Dayton, Ohio |
Nevada Nanotechnology Center | University of Nevada Las Vegas | Las Vegas , Nevada |
Notre Dame Nanofabrication Facility | Notre Dame University | South Bend, Indiana |
NU Micro/Nanofabrication Facility | Northwestern University | Evanston, Illinois |
NYIT Nanofabrication Facility | New York Institute of Technology | New York, New York |
NYU Nanofabrication Cleanroom | New York University | Brooklyn, New York |
Optical Sciences Micro/Nanofabrication Cleanroom | University of Arizona | Tucson, Arizona |
Optoelectronic Processing Facility | Boston University | Boston, Massachusetts |
Owen Cleanroom | Oregon State University | Corvallis, Oregon |
Physics Research Equipment & Facilities | University of Idaho | Moscow, Idaho |
PNNA Clean | Portland State University | Portland, Oregon |
PRISM Cleanroom | Princeton University | Princeton , New Jersey |
Pritzker Nanofabrication Facility | University of Michigan | Chicago, Illinois |
Quantum Device Nanofabrication Lab | Princeton University | Princeton , New Jersey |
Quattrone Nanofabrication Facility | University of Pennsylvania | Philadelphia, Pennsylvania |
Renewable Energy Materials Research Science & Engineering Center | Colorado School of Mines | Golden, Colorado |
Research Service Centers | University of Florida | Gainesville, Florida |
RIT Cleanroom | Rochester Institute of Technology | Rochester, New York |
Sant Engineering Innovation Laboratories | Utah State University | Logan, Utah |
School of Engineering & Applied Science Cleanroom | Yale University | New Haven, Connecticut |
Science & Engineering Cleanroom | SUNY Buffalo | Buffalo, New York |
Searle Cleanroom Nanofabrication Facility | University of Chicago | Chicago, Illinois |
Semiconductor & Microsystems Fabrication Laboratory | Rochester Institute of Technology | Rochester, New York |
Semiconductor Materials & Radiological Technologies | Kansas State University | Manhattan, Kansas |
Shared Equipment Authority Cleanroom | Rice University | Houston, Texas |
Shared Materials Instrumentation Facility | Duke University | Durham, North Carolina |
Shimadzu Institute Nano Technology Research Center | University of Texas Arlington | Arlington , Texas |
SMU Cleanroom | Southern Methodist University Cleanroom | Dallas, Texas |
Solid State Devices & Microelectronics Fabrication Facility | Southern University & A&M College | Baton Rouge, Louisiana |
Stanford Nanofabrication Facility | Stanford University | Palo Alto, California |
Texas Materials Institute Cleanroom | University of Texas Austin | Austin, Texas |
Tufts Micro & Nanofabrication Facility | Tufts University | Medford, Massachusetts |
UCLA Nanoelectronics Research Facility | University of California at Los Angeles | Los Angeles, California |
UCSB Nanofabrication Facility | University of California at Santa Barbara | Santa Barbara, California |
UD Nanofabrication Facility | University of Delaware | Newark, Delaware |
UMBC MME Technical Service Center Microfabrication Lab | University of Maryland, Baltimore County | Baltimore, Maryland |
University of Iowa Microfabrication Facility | University of Iowa | Iowa City, Iowa |
University of Virginia Microfabrication Laboratories | University of Virginia | Charlottesville, Virginia |
URNano Center | University of Rochester | Rochester, New York |
USNA Microfabrication Laboratory | U.S. Naval Academy | Annapolis, Maryland |
Utah Nanofab | University of Utah | Salt Lake City, Utah |
UW Washington Nanofabrication Facility | University of Washington | Seattle, Washington |
Whitaker Institute Lithography & Fabrication Facility | Johns Hopkins University | Baltimore, Maryland |
Wisconsin Center for Applied Microelectronics | University of Wisconsin-Madison | Madison, Wisconsin |
Wright Virginia Microelectronics Center | Virginia Commonwealth University | Richmond, Virginia |
Risks & Bottlenecks
- Funding Volatility: Many nanofabs rely on federal or state funding that can shift with policy cycles.
- Tool Cost: Even small-scale lithography and etch tools can cost millions, limiting upgrades.
- Access Inequity: High membership or usage fees can be barriers for startups and smaller universities.
- Scaling Gap: Prototypes developed in nanofabs may not scale smoothly to industrial fabs.
KPIs to Track
- User Base: Number of active researchers, startups, and companies supported.
- Tool Availability (%): Uptime and utilization of key lithography and etch tools.
- Publications & Patents: Research output driven by nanofab access.
- Startup Spinouts: Companies launched with prototypes built in nanofabs.
Market Outlook
Nanofabs represent a small but growing segment of the semiconductor ecosystem. They are increasingly viewed as strategic assets for national workforce training and innovation pipelines, especially in areas like quantum, photonics, and 2D materials. Global investment in academic and public-private nanofabs is expected to rise at a CAGR of 10%+ through 2030, driven by the intersection of semiconductor R&D and national competitiveness initiatives.
FAQs
- How do nanofabs differ from pilot lines? β Nanofabs are more academic and exploratory, while pilot lines are pre-production environments closer to industrial scale.
- Who uses nanofabs? β University researchers, government labs, startups, and corporate partners.
- Do nanofabs produce commercial chips? β Rarely; they focus on prototyping, specialty devices, and proof-of-concept runs.
- Are nanofabs part of national strategy? β Yes, they are often funded through CHIPS Act, NSF, or regional innovation programs.